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STRUCTURAL AND THERMAL INTEGRITY ANALYSIS OF CVD REACTOR SUBASSEMBLIES

TEAM LEAD: Jagrut Brahmbhatt ORGANIZATION: Larsen and Toubro Heavy Engineering STANDARDS APPLIED: ASME Section VIII Div. 1 (2021), WRC 107/297, IS 1893:2015

PROJECT OVERVIEW

As a Senior Design Engineer, I led the design verification and integrity assessment of multiple critical subassemblies within a Chemical Vapor Deposition (CVD) reactor, deployed in a polysilicon manufacturing plant. The assemblies included the Bell Jar, Baseplate, Jacketed Shell, Nozzles, and Spool Pipes. Due to the reactor’s complex and non-standard geometry, traditional code-based design was insufficient, necessitating advanced Finite Element Analysis (FEA).

SUBASSEMBLIES ANALYZED AND KEY DELIVERABLES:

Bell Jar Assembly

Objective:

  • Validate structural integrity under internal/external pressure and complex support conditions.

FEA Setup:

  • Meshing: Hex-dominant mesh with local refinement at nozzles and junctions.
  • Boundary Conditions: Fixed support at base ring; remote displacement for symmetrical constraints.
  • Loading: Included design pressure (internal: 10 bar, external: FV), bolt preload, gravity, and nozzle loads.

Highlights:

  • Performed stress linearization at 10+ critical sections to verify primary membrane and bending stresses.
  • Buckling analysis confirmed safety margins >1.5 under external pressure loading.
  • Seismic loads applied based on IS 1893 Part 4, showing structural stability in modal and response spectrum analysis.

Baseplate and Coverplate

  • Challenge: Complex cut-outs and load paths with no standard ASME provisions.
  • Approach: FEA-based thickness and junction analysis. Verified weld strength, reinforcement adequacy, and stiffness.
  • Notable Detail: Nozzles intersect both plates, requiring load mapping from flanged connections into the shell.
  • Boundary Conditions: Fixed base with bolt preload + self-weight + internal pressure distribution.

Full Reactor Seismic Assessment

  • Scope: Evaluate the complete assembly under seismic events.
  • FEA Approach:
    • Combined structural model included Bell Jar, Jacket, Nozzles, Lifting Lugs, and Support Lugs.
    • Modal analysis identified fundamental frequencies to avoid resonance.
    • Loading: Seismic acceleration from IS 1893, bolt pretension, and nozzle weights included.
  • Constraints: Baseplate anchored; lateral and vertical constraints applied for realism.

Jacketed Shell & Nozzle Systems

  • Analysis: Multi-nozzle verification for both internal/external pressure.
  • Complexities:
    • Jacketed flanges, pad flanges, and spiral stiffeners not defined in ASME – modeled and validated via FEA.
    • WRC 107/297 and WRC 537 used to validate local stress zones.
  • Boundary Conditions: Pressure applied to shell/jacket cavities, supports modeled via elastic constraints, bolt connections simulated with pretension forces.

DESIGN CHALLENGES AND RESOLUTIONS:

Challenge 1

Geometry not covered by code Many components (e.g., stub flanges, spiral baffled jackets) had geometries outside ASME Sec. VIII Div. 1. These required justification via FEA under U-2(g) clause.

Challenge 2

Combined Loading Conditions Certain parts like Nozzle A and H had to endure multiple simultaneous loads: internal/external pressure, flange bolt loads, and seismic inertia. These were resolved through nonlinear FEA simulations.

Challenge 3

Thermal/Pressure Load Coupling Considered gasket behavior, heat expansion mismatch between jacket and shell, and impact of thermal gradients, especially near nozzle junctions.

Challenge 4

Buckling and Deformation in Thin Sections Used eigenvalue buckling analysis to validate the safety margins of large-diameter sections under external pressure.

TOOLS & TECHNOLOGIES

  • FEA Tools: ANSYS Workbench, HYPERMESH
  • Design and Modelling: SolidWorks, PV Elite
  • Calculations and Documentation: MathCAD, Excel, Word

IMPACT & FUTURE SCOPE

  • Delivered fully certified MDRs for each subassembly, including ASME code compliance and client-specific design basis documentation.
  • Supported the commissioning of one of India’s first integrated polysilicon production reactors.
  • Design successfully passed third-party audits (Worley, Reliance) and field hydrotesting without modifications.